Substrate-bias
常见例句
- The results showed that diffusion coefficient and diffusive distance increased w ith raising of negative substrate bias.
結果表明擴散系數和擴散距離都隨著負襯底偏壓的增大而增大。 - In the paper, the enhancing process of diamond nucleation by negative substrate bias in hot filament CVD system was analyzed.
對利用熱燈絲CVD沉積金剛石膜時負襯底偏壓增強金剛石的核化過程進行了分析。 - Amorphous diamond(a-D) films deposited by filtered cathodic vacuum arc(FCVA) technology with different substrate bias were investigated.
採用過濾隂極真空電弧技術,通過施加不同襯底偏壓制備了非晶金剛石薄膜。 - In this paper, the nucleation process of diamond by filament CVD was analyzed, and enhanced flux of ions by negative substrate bias was investigated in theory.
摘要木文對熱燈絲CVD沉積金剛石膜的核化過程進行了分析,從理論上研究了負襯底偏壓增強活性離子的流量。 - In this paper,the nucleation process of diamond by filament CVD was analyzed,and enhanced flux of ions by negative substrate bias was investigated in theory.
本文對熱燈絲CVD沉積金剛石膜的核化過程進行了分析,從理論上研究了負襯底偏壓增強活性離子的流量. - Titanium nitride films were deposited on silicon(100) substrate at room temperature with various substrate bias voltages (corresponding to various impact energy) by energetic cluster impact (ECI).
在室溫下,以矽(100)爲襯底,在不同的襯底偏壓(即團簇不同碰撞能量)的條件下,用荷能團簇碰撞沉積方法制備了TiN薄膜。 返回 Substrate-bias