短语词组短語pumping g speed 泵速high pumping -speed cryopump 大抽速低溫泵Max Pumping Speed 最大氣量effective pumping speed 有傚抽速Vacuum pumping speed 真空抽速High Pumping Speed 抽氣速氣高Pumping Speed MM 進氣口逕pumping speed s coefficient 抽速系數 返回 pumping speed