短语词组短語sputter -etching 濺射刻蝕ion sputter etching 濺射刻蝕reactive sputter etching [電子]反應濺射刻蝕reactive sputter etching system 反應性濺鍍蝕刻系統Model NGI3000 -Sputter Etching System 完整性NGI3000離子源 返回 sputter etching